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1

Advanced Silicon Carbide Devices and Processing || Novel Developments and Challenges for the SiC Power Devices

Saddow, Stephen E., La Via, Francesco

Year:

2015

Language:

english

File:

PDF, 1.57 MB

english, 2015

2

Impact of Stacking Faults and Domain Boundaries on the Electronic Transport in Cubic Silicon Carbide Probed by Conductive Atomic Force Microscopy

Giannazzo, Filippo, Greco, Giuseppe, Di Franco, Salvatore, Fiorenza, Patrick, Deretzis, Ioannis, La Magna, Antonino, Bongiorno, Corrado, Zimbone, Massimo, La Via, Francesco, Zielinski, Marcin, Roccafo

Journal:

Advanced Electronic Materials

Year:

2020

Language:

english

File:

PDF, 1.45 MB

english, 2020

3

Study of the connection between stacking faults evolution and step kinetics in misoriented 4H-SiC epitaxial growths

Massimo Camarda, Francesco La Via, Antonino La Magna

Journal:

Surface Science

Year:

2011

Language:

english

File:

PDF, 660 KB

english, 2011

4

Richardson’s constant in inhomogeneous silicon carbide Schottky contacts

Roccaforte, Fabrizio, La Via, Francesco, Raineri, Vito, Pierobon, Roberto, Zanoni, Enrico

Journal:

Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 370 KB

english, 2003

5

Advanced Silicon Carbide Devices and Processing || Silicon Carbide for Novel Quantum Technology Devices

Saddow, Stephen E., La Via, Francesco

Year:

2015

Language:

english

File:

PDF, 5.06 MB

english, 2015

6

Multiscale simulation for epitaxial silicon carbide growth by chlorides route

Maurizio Masi, Alessandro Fiorucci, Massimo Camarda, Antonino La Magna, Francesco La Via

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 757 KB

english, 2010

7

Structural properties of SiO2 films prepared by plasma-enhanced chemical vapor deposition

Fabio Iacona, Giulio Ceriola, Francesco La Via

Journal:

Materials Science in Semiconductor Processing

Year:

2001

Language:

english

File:

PDF, 110 KB

english, 2001

8

Study of microstructure deflections and film/substrate curvature under generalized stress fields and mechanical properties

Massimo Camarda, Ruggero Anzalone, Antonino La Magna, Francesco La Via

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 430 KB

english, 2012

9

Study of the Impact of Growth and Post-Growth Processes on the Surface Morphology of 4H Silicon Carbide Films

Camarda, Massimo, Canino, Andrea, Fiorenza, Patrick, Bongiorno, Corrado, Severino, Andrea, Raineri, Vito, La Magna, Antonino, La Via, Francesco, Mauceri, Marco, Abbondanza, Giuseppe, Pecora, Antonio,

Journal:

Materials Science Forum

Year:

2012

Language:

english

File:

PDF, 604 KB

english, 2012

10

Effects of the Growth Rate on the Quality of 4H Silicon Carbide Films for MOSFET Applications

Camarda, Massimo, Privitera, Stefania, Anzalone, Ruggero, Piluso, Nicolò, Fiorenza, Patrick, Alberti, Alessandra, Pellegrino, Giovanna, La Magna, Antonino, La Via, Francesco, Vecchio, Carmelo, Mauceri

Journal:

Materials Science Forum

Year:

2014

Language:

english

File:

PDF, 628 KB

english, 2014

11

Growth of 3C-SiC on Si: Influence of Process Pressure

Severino, Andrea, Frewin, Christopher L., Anzalone, Ruggero, Bongiorno, Corrado, Fiorenza, Patrick, D'Arrigo, Giuseppe, Giannazzo, Filippo, Foti, Gaetano, La Via, Francesco, Saddow, S.E.

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 3.35 MB

english, 2009

12

Void Formation in Differently Oriented Si in the Early Stage of SiC Growth

Severino, Andrea, Bongiorno, Corrado, Anzalone, Ruggero, Abbondanza, Giuseppe, Mauceri, Marco, Condorelli, G., Foti, Gaetano, La Via, Francesco

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 2.28 MB

english, 2009

13

Evaluation of Mechanical and Optical Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared-Membrane

Anzalone, Ruggero, D'Arrigo, Giuseppe, Camarda, Massimo, Piluso, Nicolo, La Via, Francesco

Journal:

Materials Science Forum

Year:

2014

Language:

english

File:

PDF, 310 KB

english, 2014

14

3C-SiC Hetero-Epitaxial Films for Sensors Fabrication

Anzalone, Ruggero, Severino, Andrea, Locke, Christopher, Rodilosso, Davide, Tringali, Cristina, Saddow, Stephen E., La Via, Francesco, D'Arrigo, Giuseppe

Journal:

Advances in Science and Technology

Year:

2008

Language:

english

File:

PDF, 563 KB

english, 2008

15

Electrical Properties of Defects in 4H-SiC Investigated by Photo-Induced-Currents Measurements

Privitera, Stefania, Litrico, Grazia, Camarda, Massimo, Piluso, Nicolò, La Via, Francesco

Journal:

Materials Science Forum

Year:

2016

Language:

english

File:

PDF, 369 KB

english, 2016

16

4H-SiC Defects Evolution by Thermal Processes

Piluso, Nicolò, di Stefano, Maria Ausilia, Lorenti, Simona, La Via, Francesco

Journal:

Materials Science Forum

Year:

2017

Language:

english

File:

PDF, 752 KB

english, 2017

17

X-Ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si(001) wafers

Meduňa, Mojmír, Kreiliger, Thomas, Mauceri, Marco, Puglisi, Marco, Mancarella, Fulvio, Via, Francesco La, Crippa, Danilo, Miglio, Leo, Känel, Hans von

Journal:

Journal of Crystal Growth

Year:

2018

Language:

english

File:

PDF, 23.95 MB

english, 2018

18

Fabrication of a Monolithic Implantable Neural Interface from Cubic Silicon Carbide

Beygi, Mohammad, Bentley, John T., Frewin, Christopher L., Kuliasha, Cary A., Takshi, Arash, Bernardin, Evans K., La Via, Francesco, Saddow, Stephen E.

Journal:

Year:

2019

Language:

english

File:

PDF, 3.34 MB

english, 2019

19

Fabrication of a Monolithic Implantable Neural Interface from Cubic Silicon Carbide

Beygi, Mohammad, Bentley, John T., Frewin, Christopher L., Kuliasha, Cary A., Takshi, Arash, Bernardin, Evans K., La Via, Francesco, Saddow, Stephen E.

Journal:

Year:

2019

File:

PDF, 3.34 MB

2019

20

Thermal Annealing of High Dose P Implantation in 4H-SiC

Calabretta, Cristiano, Zimbone, Massimo, Barbagiovanni, Eric G., Boninelli, Simona, Piluso, Nicolò, Severino, Andrea, di Stefano, Maria Ausilia, Lorenti, Simona, Calcagno, Lucia, La Via, Francesco

Journal:

Materials Science Forum

Year:

2019

Language:

english

File:

PDF, 1.24 MB

english, 2019

21

High Resolution Investigation of Stacking Fault Density by HRXRD and STEM

Barbagiovanni, Eric G., Alberti, Alessandra, Bongiorno, Corrado, Smecca, Emanuele, Zimbone, Massimo, Anzalone, Ruggero, Litrico, Grazia, Mauceri, Marco, La Magna, Antonino, La Via, Francesco

Journal:

Materials Science Forum

Year:

2019

Language:

english

File:

PDF, 658 KB

english, 2019

22

Advanced Silicon Carbide Devices and Processing || 3C-SiC — From Electronic to MEMS Devices

Saddow, Stephen E., La Via, Francesco

Year:

2015

File:

PDF, 2.98 MB

2015

23

High Quality 4H-SiC Epitaxial Layer by Tuning CVD Process

Piluso, Nicolò, Campione, Alberto, Lorenti, Simona, Severino, Andrea, Arena, Giuseppe, Coffa, Salvo, La Via, Francesco

Journal:

Materials Science Forum

Year:

2019

Language:

english

File:

PDF, 1.47 MB

english, 2019

24

Electrical Characterisation of Thick 3C-SiC Layers Grown on Off-Axis 4H-SiC Substrates

Li, Fan, Jokubavicius, Valdas, Jennings, Michael R., Yakimova, Rositza, Pérez Tomás, Amador, Russell, Stephen, Sharma, Yogesh, Roccaforte, Fabrizio, Mawby, Philip A., La Via, Francesco

Journal:

Materials Science Forum

Year:

2019

File:

PDF, 2.14 MB

2019

25

Electrical Properties of Thermal Oxide on 3C-SiC Layers Grown on Silicon

Fiorenza, Patrick, Greco, Giuseppe, di Franco, Salvatore, Giannazzo, Filippo, Monnoye, Sylvain, Zielinski, Marcin, La Via, Francesco, Roccaforte, Fabrizio

Journal:

Materials Science Forum

Year:

2019

File:

PDF, 841 KB

2019

26

Fabrication and Characterization of Ohmic Contacts to 3C-SiC Layers Grown on Silicon

Spera, Monia, Greco, Giuseppe, Lo Nigro, Raffaella, di Franco, Salvatore, Corso, Domenico, Fiorenza, Patrick, Giannazzo, Filippo, Zielinski, Marcin, La Via, Francesco, Roccaforte, Fabrizio

Journal:

Materials Science Forum

Year:

2019

File:

PDF, 694 KB

2019

27

Characterization of 4H- and 6H-Like Stacking Faults in Cross Section of 3C-SiC Epitaxial Layer by Room-Temperature Î¼-Photoluminescence and Î¼-Raman Analysis

Scuderi, Viviana, Calabretta, Cristiano, Anzalone, Ruggero, Mauceri, Marco, La Via, Francesco

Journal:

Year:

2020

File:

PDF, 1.98 MB

2020

28

3C-SiC Bulk Growth: Effect of Growth Rate and Doping on Defects and Stress

La Via, Francesco, Mauceri, Marco, Scuderi, Viviana, Calabretta, Cristiano, Zimbone, Massimo, Anzalone, Ruggero

Journal:

Materials Science Forum

Year:

2020

File:

PDF, 485 KB

2020

29

Prospects of Bulk Growth of 3C-SiC Using Sublimation Growth

Wellmann, Peter J., Schuh, Philipp, Kollmuss, Manuel, SchÃ¶ler, Michael, Steiner, Johannes, Zielinski, Marcin, Mauceri, Marco, La Via, Francesco

Journal:

Materials Science Forum

Year:

2020

File:

PDF, 775 KB

2020

30

A kinetic Monte Carlo method on super-lattices for the study of the defect formation in the growth of close packed structures

Massimo Camarda, Antonino La Magna, Francesco La Via

Journal:

Journal of Computational Physics

Year:

2007

Language:

english

File:

PDF, 6.84 MB

english, 2007

31

Monte Carlo study of the step flow to island nucleation transition for close packed structures

Massimo Camarda, Antonino La Magna, Francesco La Via

Journal:

Surface Science

Year:

2009

Language:

english

File:

PDF, 281 KB

english, 2009

32

Stacking faults evolution during epitaxial growths: Role of surface the kinetics

Massimo Camarda, Antonino La Magna, Andrea Canino, Francesco La Via

Journal:

Surface Science

Year:

2010

Language:

english

File:

PDF, 346 KB

english, 2010

33

Dual metal SiC Schottky rectifiers with low power dissipation

Fabrizio Roccaforte, Francesco La Via, Salvatore Di Franco, Vito Raineri

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 305 KB

english, 2003

34

Structural properties of fluorinated SiO2 thin films

Fabio Iacona, Giuseppina Casella, Francesco La Via, Salvatore Lombardo, Vito Raineri, Giuseppe Spoto

Journal:

Microelectronic Engineering

Year:

2000

Language:

english

File:

PDF, 115 KB

english, 2000

35

Crystal recovery from Al-implantation induced damaging in 3C-SiC films

Andrea Severino, Nicolò Piluso, Antonio Marino, Francesco La Via

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2012

Language:

english

File:

PDF, 316 KB

english, 2012

36

Fast Growth Rate Epitaxy by Chloride Precursors

La Via, Francesco, Camarda, Massimo, Canino, Andrea, Severino, Andrea, La Magna, Antonino, Mauceri, Marco, Vecchio, Carmelo, Crippa, Danilo

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 376 KB

english, 2013

37

Monte Carlo Study of the Hetero-Polytypical Growth of Cubic on Hexagonal Silicon Carbide Polytypes

Camarda, Massimo, La Magna, Antonino, La Via, Francesco

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 740 KB

english, 2013

38

On the “Step Bunching” Phenomena Observed on Etched and Homoepitaxially Grown 4H Silicon Carbide

Camarda, Massimo, Severino, Andrea, Fiorenza, Patrick, Raineri, Vito, Scalese, S., Bongiorno, Corrado, La Magna, Antonino, La Via, Francesco, Mauceri, Marco, Crippa, Danilo

Journal:

Materials Science Forum

Year:

2011

Language:

english

File:

PDF, 2.07 MB

english, 2011

39

Electrically Trimmable Phase Change Ge2Sb2Te5 Resistors With Tunable Temperature Coefficient of Resistance

Privitera, Stefania, D'Arrigo, Giuseppe, Mio, Antonio M., Piluso, Nicolo, La Via, Francesco, Rimini, Emanuele

Journal:

IEEE Transactions on Electron Devices

Year:

2014

Language:

english

File:

PDF, 2.54 MB

english, 2014

40

X-Ray Reflectivity Study of the Structural Properties of SiO[sub 2] and SiOF Thin Films

Ceriola, Giulio, Iacona, Fabio, La Via, Francesco, Raineri, Vito, Bontempi, Elza, Depero, Laura E.

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 274 KB

english, 2001

41

Micro-Raman Characterization of 4H-SiC Stacking Faults

Piluso, Nicolo, Camarda, Massimo, Anzalone, Ruggero, La Via, Francesco

Journal:

Materials Science Forum

Year:

2014

Language:

english

File:

PDF, 352 KB

english, 2014

42

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Heteroepitaxial Growth of 3C-SiC on Silicon-Porous Silicon-Silicon (SPS) Substrates

Severino, Andrea, D`Arrigo, Giuseppe, Leone, Stefano, Mauceri, Marco, Abbondanza, Giuseppe, Terrasi, Antonio, La Via, Francesco

Year:

2006

Language:

english

File:

PDF, 999 KB

english, 2006

43

interface during oxidation of implanted silicon

Iacona, Fabio, Raineri, Vito, La Via, Francesco, Terrasi, Antonio, Rimini, Emanuele

Journal:

Physical Review B

Year:

1998

Language:

english

File:

PDF, 652 KB

english, 1998

44

Tailoring the Ti∕4H–SiC Schottky barrier by ion irradiation

Roccaforte, Fabrizio, Bongiorno, Corrado, La Via, Francesco, Raineri, Vito

Journal:

Applied Physics Letters

Year:

2004

Language:

english

File:

PDF, 397 KB

english, 2004

45

Electrical Characterization of Inhomogeneous Ni2/Si/SiC Schottky Contacts

Roccaforte, Fabrizio, La Via, Francesco, Raineri, Vito, Pierobon, R., Zanoni, E.

Journal:

Materials Science Forum

Year:

2004

Language:

english

File:

PDF, 203 KB

english, 2004

46

OHMIC CONTACTS TO SIC

ROCCAFORTE, FABRIZIO, LA VIA, FRANCESCO, RAINERI, VITO

Journal:

International Journal of High Speed Electronics and Systems

Year:

2005

Language:

english

File:

PDF, 2.31 MB

english, 2005

47

Introduction to Silicon Carbide — Materials, Processing and Devices – ADDENDUM

Saddow, Stephen E., Koshka, Yaroslav, Via, Francesco La, Sanchez, Edward, Tsuchida, Hidezaku, Zhao, Feng

Journal:

Journal of Materials Research

Year:

2013

Language:

english

File:

PDF, 47 KB

english, 2013

48

Systematic first principles calculations of the effects of stacking faults defects on the 4H-SiC band structure

Camarda, Massimo, delugas, pietro, Canino, Andrea, Severino, Andrea, piluso, nicolo, La Magna, Antonino, La Via, Francesco

Journal:

MRS Proceedings

Year:

2010

Language:

english

File:

PDF, 549 KB

english, 2010

49

Patterned substrate with inverted silicon pyramids for 3C–SiC epitaxial growth: A comparison with conventional (001) Si substrate

La Via, Francesco, D’Arrigo, Giuseppe, Severino, Andrea, Piluso, Nicolò, Mauceri, Marco, Locke, Christopher, Saddow, Stephen E.

Journal:

Journal of Materials Research

Year:

2013

Language:

english

File:

PDF, 361 KB

english, 2013

50

Single Shockley Faults Enlargement during Micro-Photoluminescence Defects Mapping

Canino, Andrea, Camarda, Massimo, La Via, Francesco

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 335 KB

english, 2010